Surface chemistry and optimization of focused ion beam iodine-enhanced etching of indium phosphide
Publication status
publishedExternal links
Journal / series
Applied Surface ScienceVolume
Pages / Article No.
Publisher
ElsevierSubject
Focused ion beam; Indium phosphide; Sputtering rate; Gas-enhanced etching; Beam scanning strategyNotes
Received 22 December 2006, Accepted 8 May 2007, Available online 18 May 2007.More
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