Proximity-effect induced density limitations for electron-beam patterned planar photonic nanomaterials
Publication status
publishedExternal links
Journal / series
Photonics and nanostructuresVolume
Pages / Article No.
Publisher
ElsevierSubject
Planar photonic-crystal fabrication; Metamaterial fabrication; Electron-beam lithography; Electron-beam proximity-effectsNotes
Received 23 July 2009, Revised 31 August 2009, Accepted 1 September 2009, Published online 6 September 2009.More
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yes
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