Visualization of mold filling stages in thermal nanoimprint by using pressure gradients
Metadata only
Date
2007Type
- Other Conference Item
ETH Bibliography
yes
Altmetrics
Publication status
publishedExternal links
Journal / series
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and PhenomenaVolume
Pages / Article No.
Publisher
American Institute of PhysicsEvent
More
Show all metadata
ETH Bibliography
yes
Altmetrics