Visualization of mold filling stages in thermal nanoimprint by using pressure gradients
Metadata only
Datum
2007Typ
- Other Conference Item
ETH Bibliographie
yes
Altmetrics
Publikationsstatus
publishedExterne Links
Zeitschrift / Serie
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and PhenomenaBand
Seiten / Artikelnummer
Verlag
American Institute of PhysicsKonferenz
ETH Bibliographie
yes
Altmetrics