High-resolution nanopatterning by achromatic spatial frequency multiplication with electroplated grating structures
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Date
2012-05Type
- Journal Article
ETH Bibliography
yes
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Publication status
publishedExternal links
Journal / series
Journal of Vacuum Science & Technology BVolume
Pages / Article No.
Publisher
American Institute of PhysicsOrganisational unit
03661 - Löffler, Jörg F. / Löffler, Jörg F.
Notes
Published online 28 March 2012.More
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ETH Bibliography
yes
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