Fabrication of nanoporous silicon nitride and silicon oxide films of controlled size and porosity for combined electrochemical and waveguide measurements

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Author
Reimhult, E.
Kumar, K.
Knoll, W.
Date
2007
Type
    Journal Article
Publication status
published
External links
Journal / series
Nanotechnology
Volume
18(27)
Pages / Article No.
275303-1 - 275303-7
Publisher
IOP Publishing
Organisational unit
03389 - Spencer, Nicholas (emeritus) / Spencer, Nicholas (emeritus)  
Notes
Received 25 February 2007, In final form 9 May 2007, Published 11 June 2007.
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