CMOS-based tactile microsensor for medical instrumentation
dc.contributor.author
Salo, Tomi
dc.contributor.author
Kirstein, Kay-Uwe
dc.contributor.author
Vančura, Tobias
dc.contributor.author
Baltes, Henry
dc.date.accessioned
2017-06-08T16:15:21Z
dc.date.available
2017-06-08T16:15:21Z
dc.date.issued
2007
dc.identifier.issn
1530-437X
dc.identifier.issn
1558-1748
dc.identifier.other
10.1109/JSEN.2006.886902
dc.identifier.uri
http://hdl.handle.net/20.500.11850/3502
dc.language.iso
en
dc.publisher
IEEE
dc.subject
Membrane capacitor
dc.subject
monolithically integrated
dc.subject
tactile sensing
dc.subject
tonometry
dc.title
CMOS-based tactile microsensor for medical instrumentation
dc.type
Journal Article
ethz.journal.title
IEEE Sensors Journal
ethz.journal.volume
7
ethz.journal.issue
2
ethz.journal.abbreviated
IEEE Sens. J.
ethz.pages.start
258
ethz.pages.end
265
ethz.notes
Manuscript received 20 February 2006, Revised 1 June 2006, Accepted 7 June 2006.
ethz.identifier.wos
ethz.identifier.nebis
004164646
ethz.publication.place
New York, NY
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02060 - Dep. Biosysteme / Dep. of Biosystems Science and Eng.::03684 - Hierlemann, Andreas / Hierlemann, Andreas
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02060 - Dep. Biosysteme / Dep. of Biosystems Science and Eng.::03684 - Hierlemann, Andreas / Hierlemann, Andreas
ethz.date.deposited
2017-06-08T16:15:29Z
ethz.source
ECIT
ethz.identifier.importid
imp59364b67e143187872
ethz.ecitpid
pub:13544
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-26T20:45:42Z
ethz.rosetta.lastUpdated
2024-02-01T14:11:14Z
ethz.rosetta.versionExported
true
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