Mechanical properties of carbon-modified silicon oxide barrier films deposited by plasma enhanced chemical vapor deposition on polymer substrates
dc.contributor.author
Bieder, A.
dc.contributor.author
Gondoin, V.
dc.contributor.author
Leterrier, Y.
dc.contributor.author
Tornare, G.
dc.contributor.author
Rudolf von Rohr, Philipp
dc.contributor.author
Manson, J.-A.E.
dc.date.accessioned
2017-06-08T16:10:33Z
dc.date.available
2017-06-08T16:10:33Z
dc.date.issued
2007-05
dc.identifier.issn
0040-6090
dc.identifier.issn
1879-2731
dc.identifier.other
10.1016/j.tsf.2006.12.176
dc.identifier.uri
http://hdl.handle.net/20.500.11850/3235
dc.language.iso
en
dc.publisher
Elsevier
dc.subject
Plasma enhanced chemical vapor deposition
dc.subject
Silicon oxide
dc.subject
Fragmentation test
dc.subject
Crack onset strain
dc.subject
Internal stresses
dc.subject
Adhesion
dc.title
Mechanical properties of carbon-modified silicon oxide barrier films deposited by plasma enhanced chemical vapor deposition on polymer substrates
dc.type
Journal Article
ethz.journal.title
Thin Solid Films
ethz.journal.volume
515
ethz.journal.issue
13
ethz.journal.abbreviated
Thin Solid Films
ethz.pages.start
5430
ethz.pages.end
5438
ethz.notes
Received 2 February 2006, Revised 22 November 2006, Accepted 6 December 2006, Available online 19 December 2006.
ethz.identifier.wos
ethz.identifier.nebis
000056364
ethz.publication.place
Amsterdam
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02629 - Institut für Verfahrenstechnik (ehem.) / Institute of Process Engineering (form)::03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02629 - Institut für Verfahrenstechnik (ehem.) / Institute of Process Engineering (form)::03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)
ethz.date.deposited
2017-06-08T16:11:03Z
ethz.source
ECIT
ethz.identifier.importid
imp59364b62d668b97842
ethz.ecitpid
pub:13235
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-14T17:28:30Z
ethz.rosetta.lastUpdated
2023-02-06T09:29:41Z
ethz.rosetta.versionExported
true
ethz.COinS
ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.atitle=Mechanical%20properties%20of%20carbon-modified%20silicon%20oxide%20barrier%20films%20deposited%20by%20plasma%20enhanced%20chemical%20vapor%20deposition%20on%20polymer%20&rft.jtitle=Thin%20Solid%20Films&rft.date=2007-05&rft.volume=515&rft.issue=13&rft.spage=5430&rft.epage=5438&rft.issn=0040-6090&1879-2731&rft.au=Bieder,%20A.&Gondoin,%20V.&Leterrier,%20Y.&Tornare,%20G.&Rudolf%20von%20Rohr,%20Philipp&rft.genre=article&rft_id=info:doi/10.1016/j.tsf.2006.12.176&
Files in this item
| Files | Size | Format | Open in viewer |
|---|---|---|---|
|
There are no files associated with this item. |
|||
Publication type
-
Journal Article [130999]