Impact of droplet properties and Nd:YAG laser characteristics on the angular distribution of EUV radiation of a LPP EUV light source for HVM EUV mask and blank inspection
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Datum
2018-04-19Typ
- Other Conference Item
ETH Bibliographie
yes
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Abstract
The driving factors to facilitate HVM EUV mask and blank inspection is the EUV radiation stability and brightness. At the Applied Laser Plasmas Science (ALPS) facility at the Laboratory for Energy Conversion (LEC) at ETH Zurich Switzerland a scalable droplet based Nd:YAG laser produced plasma source with the application in actinic blank and mask inspection is developed. Advanced measurement and data acquisition techniques allow for a detailed long term pulse to pulse EUV radiation analysis. The stability of the generated droplet based laser produced EUV emission is maintained by controlling droplet positional and temporal parameters and droplet diameter characteristics. The Nd:YAG laser characteristics are monitored and adjusted on pulse to pulse bases to enable correlation between droplet properties and EUV angular radiation. Pulse-to-pulse EUV energy data from two calibrated axisymmetric positioned E-Mons at 60� towards the laser axis is collected and allows monitoring the source brightness on a pulse to pulse bases. The main benefit of this work is the identification of the correlation between the low level source control parameters and the source output EUV radiation characteristics.
The identified low level source control parameters allow defining official specifications for a HVM EUV-LPP source for mask and blank inspection to guarantee the required EUV brightness and stability. The system automation is enhanced with increased stability due to a more detailed system model, reducing the necessity of human interaction. Hence the increased source reliability and runtime enable the source scalability to meet the demands for high volume manufacturing. Mehr anzeigen
Publikationsstatus
unpublishedKonferenz
Thema
EUV Brightness; LPP EUV SourceOrganisationseinheit
03548 - Abhari, Reza S. / Abhari, Reza S.
Anmerkungen
Conference lecture on April 19, 2018.ETH Bibliographie
yes
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