Micromachining of Carbon Materials and Laser Micropatterning of Metal Films used as Masks for Reactive Ion Etching

Metadata only

Author

Date

2006

Type

Journal Article

ETH Bibliography

yes

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Publication status

published

Journal / series

Journal of Laser Micro / Nanoengineering

Volume

1(1)

Pages / Article No.

67 - 73

Publisher

Japan Laser Processing Society

Subject

glassy carbon; micro fuel cell; laser ablation; metal film; reactive ion etching; PVDF; Sigradur; Sigracet

Organisational unit

02513 - Laboratorium für Anorganische Chemie / Laboratory of Inorganic Chemistry
03421 - Wokaun, Alexander (emeritus)

Notes

Received April 4 2005, Accepted November 22 2005.

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