CMOS humidity sensors
dc.contributor.author
Boltshauser, Thomas
dc.contributor.author
Baltes, Henry
dc.contributor.supervisor
Baltes, Heinrich P.
dc.contributor.supervisor
Denton, D. D.
dc.date.accessioned
2017-06-13T01:22:35Z
dc.date.available
2017-06-13T01:22:35Z
dc.date.issued
1993
dc.identifier.uri
http://hdl.handle.net/20.500.11850/141458
dc.identifier.doi
10.3929/ethz-a-000928575
dc.format
application/pdf
dc.language.iso
en
dc.publisher
ETH Zürich
dc.rights.uri
http://rightsstatements.org/page/InC-NC/1.0/
dc.subject
KOMPLEMENTÄRE METALLOXID-HALBLEITERSCHALTUNGEN, CMOS (MIKROELEKTRONIK)
dc.subject
SENSOREN + DETEKTOREN (ANALYTISCHE CHEMIE)
dc.subject
LUFTFEUCHTIGKEIT (METEOROLOGIE)
dc.subject
COMPLEMENTARY-METAL-OXIDE-SEMICONDUCTOR CIRCUITS, CMOS (MICROELECTRONICS)
dc.subject
SENSORS + DETECTORS (ANALYTICAL CHEMISTRY)
dc.subject
HUMIDITY (METEOROLOGY)
dc.title
CMOS humidity sensors
dc.type
Doctoral Thesis
dc.rights.license
In Copyright - Non-Commercial Use Permitted
ethz.size
II, 156 S.
ethz.code.ddc
DDC - DDC::6 - Technology, medicine and applied sciences::621.3 - Electric engineering
ethz.notes
Diss. Techn. Wiss. ETH Zürich, Nr. 10320, 1993. Ref.: H. Baltes ; Korref.: D. D. Denton.
ethz.identifier.diss
10320
ethz.identifier.nebis
000928575
ethz.publication.place
Zürich
ethz.publication.status
published
ethz.date.deposited
2017-06-13T01:23:03Z
ethz.source
ECOL
ethz.identifier.importid
imp593669ed4b9ee79195
ethz.ecolpid
eth:39241
ethz.eth
yes
ethz.availability
Closed access
ethz.rosetta.installDate
2017-07-12T15:12:13Z
ethz.rosetta.lastUpdated
2020-02-14T22:50:09Z
ethz.rosetta.versionExported
true
ethz.COinS
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Doctoral Thesis [30319]