CMOS humidity sensors

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Author
Boltshauser, Thomas
Baltes, Henry
Date
1993
Type
    Doctoral Thesis
Rights / license
In Copyright - Non-Commercial Use Permitted
Permanent link
https://doi.org/10.3929/ethz-a-000928575
Publication status
published
External links
Search print copy at ETH Library
Contributors
Examiner: Baltes, Heinrich P.
Examiner: Denton, D. D.
Publisher
ETH Zürich
Subject
KOMPLEMENTÄRE METALLOXID-HALBLEITERSCHALTUNGEN, CMOS (MIKROELEKTRONIK); SENSOREN + DETEKTOREN (ANALYTISCHE CHEMIE); LUFTFEUCHTIGKEIT (METEOROLOGIE); COMPLEMENTARY-METAL-OXIDE-SEMICONDUCTOR CIRCUITS, CMOS (MICROELECTRONICS); SENSORS + DETECTORS (ANALYTICAL CHEMISTRY); HUMIDITY (METEOROLOGY)
Notes
Diss. Techn. Wiss. ETH Zürich, Nr. 10320, 1993. Ref.: H. Baltes ; Korref.: D. D. Denton.
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