Comparison of Ion-Milling and IonSputtering to Remove Edge Roughness of EBL Defined Emitter Metallization in InP/GaAsSb DHBTs
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Date
2017Type
- Conference Paper
ETH Bibliography
yes
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Publication status
publishedBook title
2017 International Conference on Compound Semiconductor MANufacturing TECHnology. Digest of PapersPages / Article No.
Publisher
CS MANTECHEvent
Subject
edge roughness; ion-milling; ion-sputtering; InP/GaAsSb DHBTsOrganisational unit
03721 - Bolognesi, Colombo / Bolognesi, Colombo
02205 - FIRST-Lab / FIRST Center for Micro- and Nanoscience
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ETH Bibliography
yes
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