Novel Micromachining Sequence to Improve Performance and Yield of Calorimetric Microsensors

Metadata only

Author

Date

2004

Type

Other Conference Item

ETH Bibliography

yes

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Publication status

published

Editor

Book title

Technical digest of the 10th International Meeting on Chemical Sensors, July 11 - 14, 2004, Tsukuba, Japan

Journal / series

Chemical Sensors

Volume

20

Pages / Article No.

320 - 321

Publisher

Japan Association of Chemical Sensors

Event

10th International Meeting on Chemical Sensors (IMCS), Tsukaba, Japan, July 11-14, 2004

Organisational unit

03684 - Hierlemann, Andreas / Hierlemann, Andreas

Notes

Supplement B.

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ETH Bibliography

yes

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Research Collection