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Date
2013Type
- Conference Paper
ETH Bibliography
yes
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Publication status
publishedExternal links
Book title
Extreme Ultraviolet (EUV) Lithography IVJournal / series
Proceedings of SPIEVolume
Event
Subject
Extreme Ultraviolet Lithography; Beyond Extreme Ultraviolet Lithography; EUV; BEUV; 6.x nm lithography; HSQ; Organic resist; Inorganic resist; Interference lithography; Soft X-ray; 22 nm HP; Chemically-amplified resistMore
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ETH Bibliography
yes
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