Three-dimensional epitaxial Si1-xGex , Ge and SiC crystals on deeply patterned Si substrates

Thumbnail
Metadata only
Autor(in)
von Känel, Hans
Isa, Fabio
Falub, Claudiu V.
Barthazy, Eszter J.
Müller Gubler, Elisabeth
Chrastina, Daniel
Isella, Giovanni
Kreiliger, Thomas
Gonzalez Taboada, Alfonso
Meduna, Mojmir
Kaufmann, Rolf
Neels, Antonia
Dommann, Alex
Niedermann, Philippe
Mancarella, Fulvio
Mauceri, Marco
Puglisi, Marco
Crippa, Danilo
La Via, Francesco
Anzalone, Ruggero
Piluso, Nicolo
Bergamaschini, Roberto
Marzegalli, Anna
Miglio, Leo
Alle anzeigen
Datum
2014
Typ
    Conference Paper
Publikationsstatus
published
Externe Links
Herausgeber(in)
Harame, D.
Saraswat, K.
Caymax, M.
Tillack, B.
Heyns, M.
Vincent, B.
Masini, G.
Yeo, Y.C.
Miyazaki, S.
Ogura, A.
Niu, G.
Murota, J.
Reznicek, A.
Buchtitel
SiGe, Ge, and Related Compounds 6: Materials, Processing, and Devices
Zeitschrift / Serie
ECS Transactions
Band
64(6)
Seiten / Artikelnummer
631 - 648
Verlag
The Electrochemical Society
Konferenz
2014 ECS and SMEQ Joint International Meeting, Cancun, Mexico, October 5-9, 2014
Organisationseinheit
03569 - Batlogg, Bertram (emeritus)  
02891 - ScopeM / ScopeM  
Anmerkungen
Part 2.
Mehr
Alle Metadaten anzeigen
ETH Bibliographie
yes
Altmetrics