Characterization of 2D dopant profiles for the design of proton implanted high-voltage super junction
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Date
2005Type
- Conference Paper
ETH Bibliography
yes
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Publication status
publishedExternal links
Book title
Proc. of IEEE 12th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)Pages / Article No.
Publisher
IEEEEvent
Organisational unit
03228 - Fichtner, Wolfgang
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ETH Bibliography
yes
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