Process control monitors for individual single-walled carbon nanotube transistor fabrication processes

Metadata only

Author

Date

2013

Type

Conference Paper

ETH Bibliography

yes

Altmetrics

Publication status

published

External links

Book title

2013 IEEE International Conference on Microelectronic Test Structures (ICMTS 2013) : Osaka, Japan, 25 - 28 March 2013

Pages / Article No.

173 - 177

Publisher

IEEE

Event

2013 IEEE International Conference on Microelectronic Test Structures (ICMTS 2013), Osaka, Japan, March 25-28, 2013

Subject

Process monitoring; Single-walled carbon nanotube; Transistor; Monte carlo; Length and density distribution

Organisational unit

03609 - Hierold, Christofer / Hierold, Christofer

More

ETH Bibliography

yes

Altmetrics

Research Collection