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Date
2013Type
- Conference Paper
ETH Bibliography
yes
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Publication status
publishedExternal links
Book title
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20 - 24 January 2013Pages / Article No.
Publisher
IEEEEvent
Organisational unit
03609 - Hierold, Christofer / Hierold, Christofer
03627 - Nelson, Bradley J. / Nelson, Bradley J.
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ETH Bibliography
yes
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