Unusual defects, generated by wafer sawing
Metadata only
Date
2008Type
- Conference Paper
ETH Bibliography
yes
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Publication status
publishedExternal links
Journal / series
Microelectronics ReliabilityVolume
Pages / Article No.
Publisher
ElsevierEvent
Notes
Received 18 June 2008, Received in revised form 26 June 2008, Published online 8 August 2008.More
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ETH Bibliography
yes
Altmetrics