Debris emission and mitigation of droplet-based laser-produced plasma sources

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Author
Brandstätter, Markus
Date
2020
Type
    Doctoral Thesis
Rights / license
In Copyright - Non-Commercial Use Permitted
Permanent link
https://doi.org/10.3929/ethz-b-000450198
Publication status
published
External links
Search print copy at ETH Library
Contributors
Examiner: Abhari, Reza S.
Examiner: Dunne, Padraig
Publisher
ETH Zurich
Subject
PLASMA GENERATION (PLASMA PHYSICS); LASER APPLICATIONS (LASER ENGINEERING); LASER INTERACTIONS AND LASER FIELD (OPTICS); ULTRAVIOLET LIGHT SOURCES (OPTICAL INSTRUMENTS); PLASMA STATE (PLASMA PHYSICS)
Organisational unit
03548 - Abhari, Reza S. / Abhari, Reza S.  
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