Dopant imaging and profiling of wide-band-gap devices by Secondary Electron Potential Contrast
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Date
2006Type
- Conference Paper
ETH Bibliography
yes
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Publication status
publishedExternal links
Editor
Book title
IEEE International Reliability Physics Symposium proceedings, 2006Pages / Article No.
Publisher
IEEEEvent
Organisational unit
03228 - Fichtner, Wolfgang
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ETH Bibliography
yes
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