In situ Screening Techniques for Defective Oxides in Devices for Automotive Applications
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Date
2011Type
- Conference Paper
ETH Bibliography
yes
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Publication status
publishedExternal links
Book title
2011 IEEE International Reliability Physics Symposium (IRPS 2011) : Monterey, California, USA, 10 - 14 April 2011Pages / Article No.
Publisher
IEEEEvent
Subject
Built-In Reliability; Gate Oxide Reliability; STI Defects; Capacitor Reliability; Burn-InMore
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ETH Bibliography
yes
Altmetrics