MEMS scanning mirror supported by soft polymeric springs and actuated by electrostatic charge separation
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Date
2007Type
- Conference Paper
ETH Bibliography
yes
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Publication status
publishedExternal links
Book title
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)Pages / Article No.
Publisher
IEEEEvent
Organisational unit
03609 - Hierold, Christofer / Hierold, Christofer
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ETH Bibliography
yes
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