Lateral straggling of Ion implantation distributions in 4H-SiC investigated by SIMS
Metadata only
Date
2019Type
- Conference Paper
ETH Bibliography
yes
Altmetrics
Publication status
publishedExternal links
Editor
Book title
Silicon Carbide and Related Materials 2018Journal / series
Materials Science ForumVolume
Pages / Article No.
Publisher
Trans Tech PublicationsEvent
Subject
Ion implantation; Lateral straggling; SIMSOrganisational unit
09480 - Grossner, Ulrike / Grossner, Ulrike
More
Show all metadata
ETH Bibliography
yes
Altmetrics