Micro process engineering
Metadata only
Date
2006Type
- Edited Volume
ETH Bibliography
yes
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Publication status
publishedEditor
Journal / series
Advanced Micro & NanosystemsVolume
Publisher
Wiley-VCHOrganisational unit
03609 - Hierold, Christofer / Hierold, Christofer
Notes
Published online 29 February 2008.More
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ETH Bibliography
yes
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