Three-dimensional epitaxial Si1-xGex , Ge and SiC crystals on deeply patterned Si substrates

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Author
von Känel, Hans
Isa, Fabio
Falub, Claudiu V.
Barthazy, Eszter J.
Müller Gubler, Elisabeth
Chrastina, Daniel
Isella, Giovanni
Kreiliger, Thomas
Gonzalez Taboada, Alfonso
Meduna, Mojmir
Kaufmann, Rolf
Neels, Antonia
Dommann, Alex
Niedermann, Philippe
Mancarella, Fulvio
Mauceri, Marco
Puglisi, Marco
Crippa, Danilo
La Via, Francesco
Anzalone, Ruggero
Piluso, Nicolo
Bergamaschini, Roberto
Marzegalli, Anna
Miglio, Leo
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Date
2014
Type
    Conference Paper
Publication status
published
External links
Editor
Harame, D.
Saraswat, K.
Caymax, M.
Tillack, B.
Heyns, M.
Vincent, B.
Masini, G.
Yeo, Y.C.
Miyazaki, S.
Ogura, A.
Niu, G.
Murota, J.
Reznicek, A.
Book title
SiGe, Ge, and Related Compounds 6: Materials, Processing, and Devices
Journal / series
ECS Transactions
Volume
64(6)
Pages / Article No.
631 - 648
Publisher
The Electrochemical Society
Event
2014 ECS and SMEQ Joint International Meeting, Cancun, Mexico, October 5-9, 2014
Organisational unit
03569 - Batlogg, Bertram (emeritus)  
02891 - ScopeM / ScopeM  
Notes
Part 2.
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