Characterization of 2D dopant profiles for the design of proton implanted high-voltage super junction
Metadata only
Datum
2005Typ
- Conference Paper
ETH Bibliographie
yes
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Publikationsstatus
publishedExterne Links
Buchtitel
Proc. of IEEE 12th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)Seiten / Artikelnummer
Verlag
IEEEKonferenz
Organisationseinheit
03228 - Fichtner, Wolfgang
ETH Bibliographie
yes
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