Surface chemistry and optimization of focused ion beam iodine-enhanced etching of indium phosphide
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Autor(in)
Alle anzeigen
Datum
2007-09Typ
- Journal Article
ETH Bibliographie
yes
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Publikationsstatus
publishedExterne Links
Zeitschrift / Serie
Applied Surface ScienceBand
Seiten / Artikelnummer
Verlag
ElsevierThema
Focused ion beam; Indium phosphide; Sputtering rate; Gas-enhanced etching; Beam scanning strategyAnmerkungen
Received 22 December 2006, Accepted 8 May 2007, Available online 18 May 2007.ETH Bibliographie
yes
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