Visualization of mold filling stages in thermal nanoimprint by using pressure gradients
dc.contributor.author
Schift, Helmut
dc.contributor.author
Bellini, Sandro
dc.contributor.author
Mikkelsen, Morten Bo
dc.contributor.author
Gobrecht, Jens
dc.date.accessioned
2017-06-10T11:09:44Z
dc.date.available
2017-06-10T11:09:44Z
dc.date.issued
2007
dc.identifier.issn
1071-1023
dc.identifier.issn
0734-211X
dc.identifier.other
10.1116/1.2806972
dc.identifier.uri
http://hdl.handle.net/20.500.11850/58644
dc.language.iso
en
dc.publisher
American Institute of Physics
dc.title
Visualization of mold filling stages in thermal nanoimprint by using pressure gradients
dc.type
Other Conference Item
ethz.journal.title
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
ethz.journal.volume
25
ethz.journal.issue
6
ethz.journal.abbreviated
J. Vac. Sci. Technol. B
ethz.pages.start
2312
ethz.pages.end
2316
ethz.event
51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication
ethz.event.location
Denver, CO, USA
ethz.event.date
May 29 -J une 01, 2007
ethz.identifier.wos
ethz.identifier.nebis
000604586
ethz.publication.place
Melville, NY
ethz.publication.status
published
ethz.date.deposited
2017-06-10T11:11:47Z
ethz.source
ECIT
ethz.identifier.importid
imp59364fffae50b57446
ethz.ecitpid
pub:93748
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-13T13:10:25Z
ethz.rosetta.lastUpdated
2024-02-01T19:43:26Z
ethz.rosetta.versionExported
true
ethz.COinS
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Other Conference Item [19075]