Dislocation density and structure in Si1-xGex buffer layers deposited by LEPECVD

Metadata only

Author

Date

2003

Type

Conference Paper

ETH Bibliography

yes

Altmetrics

Publication status

published

Editor

Book title

Microscopy of Semiconducting Materials 2003

Journal / series

Institute of Physics Conference Series

Volume

180

Pages / Article No.

247 - 250

Publisher

IOP Publishing

Event

Conference on Microscopy of Semiconducting Materials 2003, Cambridge, United Kingdom, March 31 - April 3, 2003

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ETH Bibliography

yes

Altmetrics

Research Collection