CMOS-based monolithic controllers for smart sensors comprising micromembranes and microcantilevers
Publication status
publishedExternal links
Journal / series
IEEE Transactions on Circuits and Systems I: Regular PapersVolume
Pages / Article No.
Publisher
IEEEEvent
Subject
analog circuit design; CMOS-based microsensors; proportional (P) and proportional-integral-derivative (PID); control; MEMSOrganisational unit
03684 - Hierlemann, Andreas / Hierlemann, Andreas
Notes
Current Version Published: 2007-01-15..More
Show all metadata
ETH Bibliography
yes
Altmetrics