Micromachining of Carbon Materials and Laser Micropatterning of Metal Films used as Masks for Reactive Ion Etching
dc.contributor.author
Kuhnke, Markus
dc.contributor.author
Dumitru, Gabriel
dc.contributor.author
Lippert, Thomas
dc.contributor.author
Ortelli, Enrico
dc.contributor.author
Scherer, Günther G.
dc.contributor.author
Wokaun, Alexander
dc.date.accessioned
2017-06-08T15:47:37Z
dc.date.available
2017-06-08T15:47:37Z
dc.date.issued
2006
dc.identifier.issn
1880-0688
dc.identifier.uri
http://hdl.handle.net/20.500.11850/2312
dc.language.iso
en
dc.publisher
Japan Laser Processing Society
dc.subject
glassy carbon
dc.subject
micro fuel cell
dc.subject
laser ablation
dc.subject
metal film
dc.subject
reactive ion etching
dc.subject
PVDF
dc.subject
Sigradur
dc.subject
Sigracet
dc.title
Micromachining of Carbon Materials and Laser Micropatterning of Metal Films used as Masks for Reactive Ion Etching
dc.type
Journal Article
ethz.journal.title
Journal of Laser Micro / Nanoengineering
ethz.journal.volume
1
ethz.journal.issue
1
ethz.pages.start
67
ethz.pages.end
73
ethz.notes
Received April 4 2005, Accepted November 22 2005.
ethz.publication.place
Osaka
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02020 - Dep. Chemie und Angewandte Biowiss. / Dep. of Chemistry and Applied Biosc.::02513 - Laboratorium für Anorganische Chemie / Laboratory of Inorganic Chemistry
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02020 - Dep. Chemie und Angewandte Biowiss. / Dep. of Chemistry and Applied Biosc.::02516 - Inst. f. Chemie- und Bioingenieurwiss. / Inst. Chemical and Bioengineering::03421 - Wokaun, Alexander (emeritus)
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02020 - Dep. Chemie und Angewandte Biowiss. / Dep. of Chemistry and Applied Biosc.::02516 - Inst. f. Chemie- und Bioingenieurwiss. / Inst. Chemical and Bioengineering::03421 - Wokaun, Alexander (emeritus)
ethz.date.deposited
2017-06-08T15:47:50Z
ethz.source
ECIT
ethz.identifier.importid
imp59364b503329c69317
ethz.ecitpid
pub:12219
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-14T15:31:07Z
ethz.rosetta.lastUpdated
2020-02-14T04:16:42Z
ethz.rosetta.versionExported
true
ethz.COinS
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Journal Article [132009]