Experimentally Validated Neutral Cluster Dynamics Model for Droplet-Based LPP Sources

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Autor(in)
Hudgins, Duane
Gambino, N.
Rollinger, B.
Sanders, A.
Abhari, Reza S.
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Datum
2015
Typ
    Other Conference Item
Publikationsstatus
published
Seiten / Artikelnummer
S34
Verlag
2015 International Workshop on EUV and Soft X-Ray Sources
Konferenz
2015 International Workshop on EUV and Soft X-Ray Sources, Dublin, Ireland, November 9-11, 2015
Organisationseinheit
03548 - Abhari, Reza S. / Abhari, Reza S.  
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